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MEMS Microphone Test Handler

Multitest InPhone30 April 2014 - Multitest shipped the first MEMS Microphone Test Module that achieves a unique 65dbA signal to noise ratio over the whole frequency range of 20 Hz up to 20 kHz and sound pressure levels of > 130 dB. The total harmonic distortion at 1 kHz, 120 db is less than 1%. Depending on device size the sound pressure level is linear in a range of 20 Hz to 20 kHz.

Contrary to turret handler based test cells which have limited test parallelism and typically a lesser signal to noise ratio, the Multitest MEMS microphone test uses the unique InCarrier process that enables high parallel test of singulated devices on the Multitest InStrip handler. MEMS microphone test modules based on the well-established InStrip strip or carrier handler are in production since several years.

The InCarrier test process can securely handle devices as small as 1 mm x 1 mm and supports also handling of very small WLCSP packages. Both, "Port up" and "Port down" devices can be tested with the same handler setup by just using a different conversion kit. Conversion time between different package types is less than one hour.

A key feature of the InCarrier process is its precise and inexpensive device alignment yield excellent open short rates even at device I/O pitches as low as 0.35 mm.

Another unique advantage of the InCarrier process is that it allows scaling test parallelism from 16x up to 144x devices just by adding microphone stimulus modules. At this high level of test parallelism jam rates can be as good as 1 in 144k devices resulting in unprecedented overall equipment efficiency (OEE) and very low operator requirements for the test cell.

The microphone MEMS module can be replaced on the InStrip base handler by any of the other Multitest MEMS modules - InFlip, InGyro, InPressure - and support single insertion test of 3, 6 or 9 DOF combo sensors (acceleration, gyro, and magnetic sensors) or (tire) pressure sensors. Replacing the MEMS module by a contactor unit, makes the InStrip base handler ready for standard IC package test.

Together with LTX-Credence Multitest can provide turnkey test cell solutions including test handler, contactors, DUT board and tester. Upon request the complete test cell can be integrated at Multitest facilities to warrant for minimal time-to-production in the startup process.

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